3D geometric phase analysis and its application in 3D microscopic morphology measurement

Although three-dimensional (3D) morphology measurement has been widely applied on the macro-scale, there is still a lack of 3D measurement technology on the microscopic scale. In this paper, a microscopic 3D measurement technique based on the 3D-geometric phase analysis (GPA) method is proposed. In this method, with machine vision and phase matching, the traditional GPA method is extended to three dimensions. Using this method, 3D deformation measurement on the micro-scale can be realized using a light microscope. Simulation experiments were conducted in this study, and the results demonstrate that the proposed method has a good anti-noise ability. In addition, the 3D morphology of the necking zone in a tensile specimen was measured, and the results demonstrate that this method is feasible.