高温压电加速度传感器设计与仿真优化

The high temperature piezoelectric accelerometers are widely used in vibration and impact testing, fault diagnosis and monitoring. In order to address the problem of excessive temperature drift in the sensitivity of conventional piezoelectric accelerometers, a high temperature piezoelectric accelerometer is designed in this paper. The accelerometer adopts a design of stacked piezoelectric elements with positive and negative temperature coefficient to counteract the effect of temperature variation and thereby reduce temperature drift. A compression-mode piezoelectric accelerometer is constructed by stacking 5 layers of YCOB piezoelectric elements and 1 layer of GdCOB piezoelectric elements. The performance of the accelerometer was simulated and optimized using ANSYS, and the effectiveness of the proposed method for reducing sensitivity temperature drift was verified through simulation. The results show that the sensitivity temperature drift of the designed accelerometer is less than ±3% over the full temperature range from room temperature to 800 ℃, and it has the advantages of good high temperature stability and high measurement accuracy.