Abstract
Considering the low accuracy and slow speed of measuring objects with spherical surfaces using traditional interferometry due to manual adjustments, an automatic laser confocal interferometric method is proposed for rapid and high-precision measurement of surface shapes. This method utilizes precise confocal fixed-focus technology for accurate confocal axial positioning of the object. The object's posture is adjusted using a five-dimensional workbench. Zernike fitting is employed to minimize defocus and tilt errors, achiev⁃ ing zero-order fringe adjustment and automatic determination of the surface shape. A laser confocal interfer⁃ ometric measurement system was developed for this purpose. Experimental results show that the difference between the automatic interference measurement results and those of the Zygo interferometer is 0.000 6λ, with a repeatability accuracy of 0.001 9λ. The average measurement time for a single surface is 16.5 s, im⁃ proving measurement efficiency by 1.56 times compared to manual adjustments. This method offers an ef⁃ fective solution for the rapid and precise measurement of interferometric surface shapes.
| Translated title of the contribution | Laser confocal interference surface rapid and high-precision automatic measurement |
|---|---|
| Original language | Chinese (Traditional) |
| Pages (from-to) | 1320-1329 |
| Number of pages | 10 |
| Journal | Guangxue Jingmi Gongcheng/Optics and Precision Engineering |
| Volume | 32 |
| Issue number | 9 |
| DOIs | |
| Publication status | Published - May 2024 |