Abstract
It is difficult to realize high efficiency of axial scanning differential confocal measurement (ASDCM). In this article, a differential confocal profile tracking measurement method based on Kalman prediction is proposed. In this method, the linear range of hundreds of nanometers of laser differential confocal axial response curve is used for high-precision linear sensing measurement of the continuous surface profile, which improves the measurement efficiency. Meanwhile, the Kalman predictor profile tracking method is introduced to predict and track the unmeasured surface using the measured profile point data, which expands the range of linear sensing profile measurement. Compared with the ASDCM, experimental results show that the measurement efficiency of this method is improved by 8 times, the high-precision tracking measurement of the standard elliptical column with the PV value of the outer profile is greater than the linear sensing measurement range, and the repeated measurement standard deviation of the roundness of the laser inertial confinement fusion capsule is 3 nm. It provides a high quality method for high precision, fast and nondestructive measurement of continuous surface profile of rotary precision components.
| Translated title of the contribution | Differential confocal profile tracking measurement method based on Kalman prediction |
|---|---|
| Original language | Chinese (Traditional) |
| Pages (from-to) | 25-32 |
| Number of pages | 8 |
| Journal | Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument |
| Volume | 44 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - Mar 2023 |