五 维 位 姿 监 测 的 差 动 共 焦 曲 率 半 径 测 量

To improve the measurement accuracy of the radius of curvature，a high-precision measurement method of a differential confocal radius of curvature based on a five-dimensional（5D）pose monitoring adjustment was proposed. On the basis of the differential confocal curvature radius measurement system，this method introduces a 5D position monitoring and adjustment structure by driving the measured part rotation on the detector to monitor the confocal trajectory. In addition，it enables measurement of the eccentric error of the spherical center point of the measured part and the measured optical axis，combined with two-dimensional（2D）translation and 2D angle adjustment to automatically compensate for the eccentric error. Further，it aims to ensure that the measured sample spherical center and the measured optical axis are in good agreement during the measurement process，eliminate the measurement cosine error caused by the deviation of the spherical center of the measured sample，and eliminate the influence of the sample posture error on the measurement accuracy of each installation. Based on the results obtained，repeatability measurements are significantly improved with the proposed method. Theoretical simulation and preliminary experimental results show that the repeatability of the proposed method for measuring the radius of curvature can reach 3. 2×10^-6. This method is shown to be an effective way of obtaining a precise measurement of the radius of curvature. At the same time，this method can also be extended to the measurement of the lens center deviation，focal length，thickness，lens group interval，and other parameters to improve the measurement repeatability of lens parameters.