TY - GEN
T1 - Verification and test system technology for CMOS-MEMS switches
AU - Peng, Liu
AU - Lou, Wenzhong
AU - Ximing, Dai
AU - Yufei, Lu
N1 - Publisher Copyright:
© 2015 IEEE.
PY - 2015/7/1
Y1 - 2015/7/1
N2 - A high-performance, low-cost test equipment system for characterization of MEMS switch is to be proposed in this paper, and the purpose is set to master the fundament of the embedded algorithms of the wafer and system production testing. The team has implemented the real-time analysis for MEMS switch, proving the feasibility of the design, based on the original data collected during the dedicated tests, applying the microsystem hardware designed and assembled by the research team, as well as the embedded software. At the end, the framework of the system platform in the future is described.
AB - A high-performance, low-cost test equipment system for characterization of MEMS switch is to be proposed in this paper, and the purpose is set to master the fundament of the embedded algorithms of the wafer and system production testing. The team has implemented the real-time analysis for MEMS switch, proving the feasibility of the design, based on the original data collected during the dedicated tests, applying the microsystem hardware designed and assembled by the research team, as well as the embedded software. At the end, the framework of the system platform in the future is described.
KW - CMOS-MEMS Switch Microsystem
KW - FPGA
KW - Test Equipment System
KW - Testing Algorithms
UR - http://www.scopus.com/inward/record.url?scp=84939525745&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2015.7147497
DO - 10.1109/NEMS.2015.7147497
M3 - Conference contribution
AN - SCOPUS:84939525745
T3 - 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
SP - 585
EP - 588
BT - 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
Y2 - 7 April 2015 through 11 April 2015
ER -