Vectorial pupil optimization to compensate for a polarization effect at full exposure field in lithography

Miao Yuan, Yiyu Sun, Pengzhi Wei, Zhaoxuan Li, Guanghui Liao, Yaning Li, Lulu Zou, Yanqiu Li*

*此作品的通讯作者

科研成果: 期刊稿件 › 文章 › 同行评审

4 引用 （Scopus）

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Engineering

Chemical Engineering

Material Science