Ultrashallow Junction Electrodes in Low-Loss Silicon Microring Resonators

Bin Bin Xu, Gabriele G. De Boo, Brett C. Johnson, Miloš Rančić, Alvaro Casas Bedoya, Blair Morrison, Jeffrey C. McCallum, Benjamin J. Eggleton, Matthew J. Sellars, Chunming Yin^*, Sven Rogge