Two-axis scanning micromirror based on a tilt-and-lateral shift-free piezoelectric actuator

Engineering

• Micromirrors 100%
• Piezoelectric Actuator 100%
• Thin Films 50%
• Actuation 50%
• Two Dimensional 50%
• Piezoelectric 50%
• Piezoelectric Material 50%
• Silicon Substrate 50%
• Film Layer 50%