@inproceedings{11087af8980c4b478d8eec7880bfcbcd,
title = "Thin Film PZT Multimode Resonant MEMS Temperature Sensor",
abstract = "This digest paper reports on the experimental demonstration of an integrated multimode resonant MEMS temperature sensor by exploiting a thin film ceramic PZT multi-frequency piezoelectric micromachined ultrasonic transducers (pMUTs) in the MHz range. The three resonance modes examined (at 1.107, 3.620, 6.778MHz) all exhibit excellent linearity and responsivity to temperature variations in the range of 0 to 211°C, with temperature coefficients of resonance frequency (TCf) at ∼ -200 to -270ppm/°C for open-loop measurement. We have demonstrated the temperature sensing with real-time tracking of the resonance frequency using a phase-locked loop. We also build a self-sustaining MEMS oscillator and study the closed-loop TCf which is smaller than the open-loop TCf. We compare the open-loop and closed-loop TCfs in both air and vacuum for different type of heaters and find that the TCf can be affected by heating method, pressure, and measurement scheme.",
keywords = "MEMS, ceramic PZT, oscillator, phase-locked loop, temperature sensor",
author = "Wen Sui and Tahmid Kaisar and Haoran Wang and Yihao Wu and Jaesung Lee and Huikai Xie and Feng, {Philip X.L.}",
note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 IEEE Sensors Conference, SENSORS 2022 ; Conference date: 30-10-2022 Through 02-11-2022",
year = "2022",
doi = "10.1109/SENSORS52175.2022.9967330",
language = "English",
series = "Proceedings of IEEE Sensors",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2022 IEEE Sensors, SENSORS 2022 - Conference Proceedings",
address = "United States",
}
