The use of AFM in assessing the crack resistance of silicon wafers of various orientations
Vasilina A. Lapitskaya, Tatyana A. Kuznetsova, Anastasiya V. Khabarava, Sergei A. Chizhik, Sergei M. Aizikovich, Evgeniy V. Sadyrin*, Boris I. Mitrin, Weifu Sun