The structure design of micromachined gyroscope based on resonant tunneling diodes

A novel electromagnetic drive micromachined gyroscope based on meso-piezoresistive effect is proposed and the structure is designed. The method of electromagnetic drive is used, which achieves the requirement of low operating voltage, large driven force and great displacement. The sensitivity of gyroscope is increased essentially by using the meso-piezoresistive effect of resonant tunneling diodes. The modal simulation and path analysis is processed using the ANSYS software, which determines the natural frequencies and location of the resonant tunneling diodes. According to the present process technology, the process design of gyroscope is presented and the structure fabrication is achieved.