The SS-OCT endomicroscopy probe based on MOEMS Mirau micro-interferometer for early stomach cancer detection

Przemyslaw Struk, Sylwester Bargiel, Quentin A.A. Tanguy, Christophe Gorecki, Huikai Xie, Ravinder Chutani, Nicolas Passilly, Alain Billard

科研成果: 书/报告/会议事项章节会议稿件同行评审

2 引用 (Scopus)

摘要

In this paper, we present the construction and preliminary experimental results of a MOEMS fiber-based integrated probe for endoscopic optical imaging of stomach tissue using a Swept-Source Optical Coherence Tomography (SSOCT). The probe consists of a Mirau micro-interferometer, combined with a GRIN lens collimator and a micromirror scanner. We describe the building blocks of the probe, especially the monolithically integrated Mirau mirointerferometer, fabricated by wafer-level vertical stacking and anodic bonding of Si/glass components, and the electrothermal 2-axis MEMS microscanner allowing large swept angles (up to ±22°) at high frequencies (> kHz) for low driving voltages (<20 V). The results of probe characterization, performed in a designed SS-OCT system, have confirmed proper operation of the probe. The B-scan images were obtained for central wavelength of λc = 840 nm, swept range of Dλ = 60 nm and A-scan frequency of fA= 110 kHz. The axial resolution of the probe is equal to 5.2 μm (determined by applied swept source), whereas the lateral resolution, measured by use of USAF test pattern, is 9.8 μm.

源语言英语
主期刊名Optical Micro- and Nanometrology VII
编辑Anand Krishna Asundi, Wolfgang Osten, Christophe Gorecki
出版商SPIE
ISBN(电子版)9781510618824
DOI
出版状态已出版 - 2018
已对外发布
活动Optical Micro- and Nanometrology VII 2018 - Strasbourg, 法国
期限: 25 4月 201826 4月 2018

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
10678
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议Optical Micro- and Nanometrology VII 2018
国家/地区法国
Strasbourg
时期25/04/1826/04/18

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