The properties of Cu metallization based on CuMgAl alloy buffer layer

Zhinong Yu*, Jianshe Xue, Qi Yao, Zhengliang Li, Guanbao Hui, Wei Xue

*此作品的通讯作者

科研成果: 期刊稿件文章同行评审

5 引用 (Scopus)

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Engineering

Material Science