The method of axial fast identified focus of laser differential confocal microscopy imaging

A fast axial focus identification method based on real-time judgment of light intensity signal is proposed. The samples is scanned by the method in the horizontal plane with the axial movement of measurement objective. The method can real-timely observes and disposes the optical intensity signal collected by the detector before the focus and the detector behind the focus. The focal plane is found through judging the positional relation of measurement surface and sample of the real-time image. It can realize the fast and accurate axial focus identification, and improves the identification speed of the focus significantly. The theoretical analysis and preliminary experiments show that the method can achieve axial focus identification in a scan cycle. In comparison with the definition method of the focus, it saves the process time of more than 90% with the same identification accuracy of the focus.