@inproceedings{73742918f83941a39e6b1eedcb62ba4b,
title = "The fabrication and multi-physics simulation of a novel low power electrothermal bimorph actuator",
abstract = "This paper presents the multi-physical simulations and fabrication of a novel electrothermal bimorph actuator. The dimension and structure of the actuator is improved based on the theory of optimal thickness configuration, and its three-dimensional modeling is conducted with the software CoventorWare. To confirm the performance of the new micro-actuator, many simulations are made by a method of multiphysical coupling supplied by the simulation software COMSOL Multiphysics. The results of multi-physical simulations show that the device could achieve large displacement with low-power in short response time. Finally, an available fabrication process flow is presented. Currently the novel electrothermal bimorph actuator is in production, and its performance will be tested when the processing is ended.",
keywords = "Electrothermal bimorph actuator, Fabrication, MEMS, Multi-Physics simulation, Optimal thickness",
author = "Lou, {Wen Zhong} and Guo, {Ming Ru} and Lv, {Yong Jia} and Song, {Rong Chang} and Peng Liu",
year = "2012",
language = "English",
isbn = "9781466562752",
series = "Technical Proceedings of the 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012",
pages = "239--242",
booktitle = "Nanotechnology 2012",
note = "Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012 ; Conference date: 18-06-2012 Through 21-06-2012",
}