摘要
This paper presents a submicron centroid position measurement method. Two laser displacement sensors are placed in the two ends of a screw connected structure for a real-time measurement. The entire measuring device is placed in a temperature controllable environment to measure the position change of the screw connected structure while temperature load is applied. The centroid position change of screw connected structure is calculated from the measured data. Uncertainty of the measurement method is analysed and a measurement experiment is carried out on the design structure. Under the action of a pre-tightening force about 400 N and a temperature change of 40°C, the maximum centroid position change of the structure is 7.46 μm. Finally, simulation based on surface form error of the measured structure is carried out to confirm that the measurement method proposed in this paper is effective.
源语言 | 英语 |
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页(从-至) | 287-298 |
页数 | 12 |
期刊 | International Journal of Nanomanufacturing |
卷 | 16 |
期 | 4 |
DOI | |
出版状态 | 已出版 - 2020 |