摘要
To make the design and fabrication of planar W-form micro-springs based on MEMS technology convenient, expressions used to calculate the micro-spring made of different materials constant by its structural parameters are derived by energy method, and subsequently verified correct with tensile test and ANSYS finite element method using nickel planar W-form micro-springs. The stiffness response of the micro-spring to its structural parameters was also analyzed by the formula precedingly derived and the simulation results. Therefore the reliability and the optimization design of MEMS can be improved.
| 源语言 | 英语 |
|---|---|
| 页（从-至） | 471-474 |
| 页数 | 4 |
| 期刊 | Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology |
| 卷 | 26 |
| 期 | 6 |
| 出版状态 | 已出版 - 6月 2006 |