Structure design and processing of capacitive MEMS vibrating ring gyroscope

Jian Hua Li, Li Xin Xu, Bo Fu, Feng Qin Wang

科研成果: 期刊稿件文章同行评审

5 引用 (Scopus)

指纹

探究 'Structure design and processing of capacitive MEMS vibrating ring gyroscope' 的科研主题。它们共同构成独一无二的指纹。

Engineering

Physics