State-of-the-art of micro cutting tool and its related technologies

Micro cutting tool is the key and fundamental technology of micro cutting which is an effective micro machining technology for micro structure made of multi-materials such as metal, alloy, composite material, ceramic, glass and silicon. The state-of-the-art of micro cutting tool were reviewed herein. Design and manufacture technology of micro cutting tool were analyzed from the view point of advanced cutting tool material, design philosophy, fabrication method and coating. Furthermore, related technologies such as adjustment, deflection compensation, tool condition monitoring, tool path optimization as well as characteristics, mechanism and estimation of wear and breakage of micro cutting tool were introduced.