Sputtered AlOx interlayer for improving performance of a-InGaZnO TFTs: A study on hydrogen diffusion mitigation and electron modulation

Bin Liu, Feng Wang*, Xuyang Li, Dan Kuang, Xianwen Liu, Shuo Zhang, Zongchi Bao, Guangcai Yuan, Jian Guo, Ce Ning, Dawei Shi, Zhinong Yu*

*此作品的通讯作者

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Engineering

Material Science

Chemical Engineering