Software system design for the non-null digital Moiré interferometer

Meng Chen, Qun Hao, Yao Hu*, Shaopu Wang, Tengfei Li, Lin Li

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

Aspheric optical components are an indispensable part of modern optics systems. With the development of aspheric optical elements fabrication technique, high-precision figure error test method of aspheric surfaces is a quite urgent issue now. We proposed a digital Moiré interferometer technique (DMIT) based on partial compensation principle for aspheric and freeform surface measurement. Different from traditional interferometer, DMIT consists of a real and a virtual interferometer. The virtual interferometer is simulated with Zemax software to perform phase-shifting and alignment. We can get the results by a series of calculation with the real interferogram and virtual interferograms generated by computer. DMIT requires a specific, reliable software system to ensure its normal work. Image acquisition and data processing are two important parts in this system. And it is also a challenge to realize the connection between the real and virtual interferometer. In this paper, we present a software system design for DMIT with friendly user interface and robust data processing features, enabling us to acquire the figure error of the measured asphere. We choose Visual C++ as the software development platform and control the ideal interferometer by using hybrid programming with Zemax. After image acquisition and data transmission, the system calls image processing algorithms written with Matlab to calculate the figure error of the measured asphere. We test the software system experimentally. In the experiment, we realize the measurement of an aspheric surface and prove the feasibility of the software system.

源语言英语
主期刊名Optical Metrology and Inspection for Industrial Applications IV
编辑Toru Yoshizawa, Sen Han, Song Zhang
出版商SPIE
ISBN(电子版)9781510604650
DOI
出版状态已出版 - 2016
活动Conference on Optical Metrology and Inspection for Industrial Applications IV - Beijing, 中国
期限: 12 10月 201614 10月 2016

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
10023
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议Conference on Optical Metrology and Inspection for Industrial Applications IV
国家/地区中国
Beijing
时期12/10/1614/10/16

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