Simulation and experimental study on the precision glass molding for microstructures on optical glass based on relaxation effect

Zhanchen Zhu, Tianfeng Zhou, Jiaqing Xie, Qian Yu, Jia Zhou, Xibin Wang

科研成果: 书/报告/会议事项章节会议稿件同行评审

2 引用 (Scopus)

摘要

To manufacture high precision optical glass microstructures, finite element simulation and experiments of precision glass molding (PGM) are carried out to study the influence of relaxation effect on internal stress and deformation of the glass material. Two kinds of microstructures including microgrooves and micropyramids are fabricated by PGM. First, a two-dimensional axisymmetric finite element model of the PGM is established, and three kinds of molding schemes are put forward and analyzed, including quick molding and holding for a period of time, molding with low speed, molding by gravity. The advantages and disadvantages of the three schemes are also analyzed. Second, the microgrooves are fabricated using the scheme of molding by gravity, and then the existing problems are discussed. Finally, the micropyramids are fabricated by the low speed molding method, and the forming profiles are compared.

源语言英语
主期刊名9th International Symposium on Advanced Optical Manufacturing and Testing Technologies
主期刊副标题Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics
编辑Xiangang Luo, Mingbo Pu, Bin Fan, Reinhart Poprawe, Xiong Li, Min Gu
出版商SPIE
ISBN(电子版)9781510623224
DOI
出版状态已出版 - 2019
活动9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics - Chengdu, 中国
期限: 26 6月 201829 6月 2018

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
10840
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics
国家/地区中国
Chengdu
时期26/06/1829/06/18

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