Silicon-based tool electrodes for micro electrochemical machining

Engineering

• Side Wall 100%
• Experimental Result 50%
• Chemical Vapor Deposition 50%
• Vapor Deposition 50%
• Nitride 50%
• Microhole 50%
• Insulation Property 50%
• Circular Cross Section 50%
• Adhesive Strength 50%
• Monocrystalline Silicon 50%
• Taper Angle 50%
• Section Size 50%
• Material Dissolution 50%