Room-temperature plasma doping without bias power for introduction of Fe, Au, Al, Ga, Sn and In into Si

Ruixiang Hou, Ziang Xie, Lei Li, Xixi Xie, Xiaolong Xu, Xin Fang, Li Tao, Wanjing Xu, Nongnong Ma, Youqin He, Xiao Chen, Shixiang Peng, Engang Fu, Zhigang Yuan, Guogang Qin*

*此作品的通讯作者

科研成果: 期刊稿件 › 文章 › 同行评审

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