Retrieve polarization aberration from image degradation: A new measurement method in DUV lithography

Engineering

• Lithography 100%
• Situ Measurement 100%
• Aerial Image 100%
• Aberration Coefficient 100%
• Demonstrates 50%
• Simulation Result 50%
• Conductive 50%
• One Dimensional 50%
• Optimisation Problem 50%
• Nonlinear System 50%
• Least Square 50%
• Quadratic Equation 50%
• Coupling Effect 50%
• Square Method 50%
• Precise Measurement 50%

Earth and Planetary Sciences

• Measurement Method 100%
• In Situ Measurement 66%
• Nonlinear System 33%