Research on the microbarn assembly accuracy influenced by the machining errors of silicon arm

To predict the influence of machining errors on ignition target assembly accuracy, the influence of machining errors on silicon arm's stiffness and the stress distribution was studied. Combined ANSYS with Pro/E reverse engineering, the processed sample of silicon arm was modeled and simulated. The mathematic model established the relation of micro-force to micro-displacement. Based on numeric simulation and experiment method, the stiffness and stress differences were compared on the silicon arm with machining errors and the design size, and the assembly accuracy was analyzed quantificationally. The results show that, the influence of the nonlinear errors and nonuniform stress distribution caused by the assembly force and form-position errors is significant to assembly accuracy.