Research on relativistic Rutherford formula for high-energy electron beam lithography

Guo Rong Zhao, Yan Qiu Li

科研成果: 期刊稿件 › 文章 › 同行评审

源语言	英语
页（从-至）	5
页数	1
期刊	Weixi Jiagong Jishu/Microfabrication Technology
期	3
出版状态	已出版 - 9月 2004
已对外发布	是

其它文件与链接

@article{877e4ef278f44d3baca96251ea186eaf,

title = "Research on relativistic Rutherford formula for high-energy electron beam lithography",

author = "Zhao, {Guo Rong} and Li, {Yan Qiu}",

year = "2004",

month = sep,

language = "English",

pages = "5",

journal = "Weixi Jiagong Jishu/Microfabrication Technology",

issn = "1003-8213",

publisher = "Weixi Jiagong Jishu",

number = "3",

}

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T1 - Research on relativistic Rutherford formula for high-energy electron beam lithography

AU - Zhao, Guo Rong

AU - Li, Yan Qiu

PY - 2004/9

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M3 - Article

AN - SCOPUS:7244260301

SN - 1003-8213

SP - 5

JO - Weixi Jiagong Jishu/Microfabrication Technology

JF - Weixi Jiagong Jishu/Microfabrication Technology

IS - 3

ER -