TY - GEN
T1 - Repairing damage on ground fused silica by CO2 laser irradiation
AU - Yao, Peng
AU - Abe, Takuro
AU - Yoshihara, Nobuhito
AU - Zhou, Tianfeng
AU - Yan, Jiwang
AU - Kuriyagawa, Tsunemoto
PY - 2010
Y1 - 2010
N2 - Fused silica is an important material for optics of ultraviolet laser transmission. It is difficult to be ground in ductile mode because of a high brittleness. In this paper, ductile mode grinding was achieved by a taper grinding method when the initial surface was a polished surface. However, when the initial surface was an unpolished surface, ductile mode grinding could not be realized because of the existence of surface and subsurface damages. The damages on the ground fused silica surface were repaired by CO2 laser irradiation with optimal laser power and scanning velocity. The optimal parameters were determined by studying the viscosity of fused silica and etching depth of laser irradiated groove. Besides laser processing parameters, surface roughness of laser irradiated surface is also greatly influenced by the initial surface roughness
AB - Fused silica is an important material for optics of ultraviolet laser transmission. It is difficult to be ground in ductile mode because of a high brittleness. In this paper, ductile mode grinding was achieved by a taper grinding method when the initial surface was a polished surface. However, when the initial surface was an unpolished surface, ductile mode grinding could not be realized because of the existence of surface and subsurface damages. The damages on the ground fused silica surface were repaired by CO2 laser irradiation with optimal laser power and scanning velocity. The optimal parameters were determined by studying the viscosity of fused silica and etching depth of laser irradiated groove. Besides laser processing parameters, surface roughness of laser irradiated surface is also greatly influenced by the initial surface roughness
KW - Brittle mode
KW - CO laser irradiation
KW - Ductile mode
KW - Fused silica
KW - Subsurface damage
UR - http://www.scopus.com/inward/record.url?scp=78650942867&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/AMR.126-128.401
DO - 10.4028/www.scientific.net/AMR.126-128.401
M3 - Conference contribution
AN - SCOPUS:78650942867
SN - 9780878492428
T3 - Advanced Materials Research
SP - 401
EP - 406
BT - Advances in Abrasive Technology XIII
T2 - 13th International Symposium on Advances in Abrasive Technology, ISAAT2010
Y2 - 19 September 2010 through 22 September 2010
ER -