Reduction of capacitive coupling in inductively coupled plasmas by solenoid coils on dielectric window

Bocong Zheng, Maheshwar Shrestha, Keliang Wang, Thomas Schuelke, Evgeny Shun'ko, Veniamin Belkin, Qi Hua Fan*

*此作品的通讯作者

科研成果: 期刊稿件 › 文章 › 同行评审

8 引用 （Scopus）

指纹

探究 'Reduction of capacitive coupling in inductively coupled plasmas by solenoid coils on dielectric window' 的科研主题。它们共同构成独一无二的指纹。

Engineering

Material Science