Preparation and characterization of PZT thick film for piezoelectric cantilever beam by sol-gel

Hong Mei Liu; Quan Liang Zhao; Zhong Xia Duan; Cheng Jun Qiu; Mao Sheng Cao

Preparation and characterization of PZT thick film for piezoelectric cantilever beam by sol-gel

Hong Mei Liu^*, Quan Liang Zhao, Zhong Xia Duan, Cheng Jun Qiu, Mao Sheng Cao

^*此作品的通讯作者

材料学院

科研成果: 期刊稿件 › 文章 › 同行评审

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摘要

A sol-gel technology which was used to fabricate PZT thick film for cantilever beam was investigated. After PZT filtered sol and sol suspension with PZT nano-powders prepared respectively, they were spun alternately on an Au/Cr/SiO₂/Si substrate, and then pyrolyzed and annealed to form PZT crystalline phase films. Above process was repeated in order to deposit the desired thickness. The XRD results show that the perovskite PZT thick film is obtained after annealing at 650°C for 15 min. The cross section is clear and surface is dense, homogeneous and smooth. The film has the saturation polarization of 54μC/cm², the remnant polarization of 30μC/cm² and the coercive field of 50 kV/cm. The cantilever beam was fabricated by micromaching technology and the PZT thick film was etched by BHF/HCl solutions.

源语言	英语
页（从-至）	1499-1502
页数	4
期刊	Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology
卷	39
期	9
出版状态	已出版 - 9月 2007

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@article{6cc0446428be4d3ea44614b52e191e69,

title = "Preparation and characterization of PZT thick film for piezoelectric cantilever beam by sol-gel",

abstract = "A sol-gel technology which was used to fabricate PZT thick film for cantilever beam was investigated. After PZT filtered sol and sol suspension with PZT nano-powders prepared respectively, they were spun alternately on an Au/Cr/SiO2/Si substrate, and then pyrolyzed and annealed to form PZT crystalline phase films. Above process was repeated in order to deposit the desired thickness. The XRD results show that the perovskite PZT thick film is obtained after annealing at 650°C for 15 min. The cross section is clear and surface is dense, homogeneous and smooth. The film has the saturation polarization of 54μC/cm2, the remnant polarization of 30μC/cm2 and the coercive field of 50 kV/cm. The cantilever beam was fabricated by micromaching technology and the PZT thick film was etched by BHF/HCl solutions.",

keywords = "Cantilever beam, PZT, Sol-gel, Thick film",

author = "Liu, {Hong Mei} and Zhao, {Quan Liang} and Duan, {Zhong Xia} and Qiu, {Cheng Jun} and Cao, {Mao Sheng}",

year = "2007",

month = sep,

language = "English",

volume = "39",

pages = "1499--1502",

journal = "Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology",

issn = "0367-6234",

publisher = "Harbin Institute of Technology",

number = "9",

}

TY - JOUR

T1 - Preparation and characterization of PZT thick film for piezoelectric cantilever beam by sol-gel

AU - Liu, Hong Mei

AU - Zhao, Quan Liang

AU - Duan, Zhong Xia

AU - Qiu, Cheng Jun

AU - Cao, Mao Sheng

PY - 2007/9

Y1 - 2007/9

N2 - A sol-gel technology which was used to fabricate PZT thick film for cantilever beam was investigated. After PZT filtered sol and sol suspension with PZT nano-powders prepared respectively, they were spun alternately on an Au/Cr/SiO2/Si substrate, and then pyrolyzed and annealed to form PZT crystalline phase films. Above process was repeated in order to deposit the desired thickness. The XRD results show that the perovskite PZT thick film is obtained after annealing at 650°C for 15 min. The cross section is clear and surface is dense, homogeneous and smooth. The film has the saturation polarization of 54μC/cm2, the remnant polarization of 30μC/cm2 and the coercive field of 50 kV/cm. The cantilever beam was fabricated by micromaching technology and the PZT thick film was etched by BHF/HCl solutions.

AB - A sol-gel technology which was used to fabricate PZT thick film for cantilever beam was investigated. After PZT filtered sol and sol suspension with PZT nano-powders prepared respectively, they were spun alternately on an Au/Cr/SiO2/Si substrate, and then pyrolyzed and annealed to form PZT crystalline phase films. Above process was repeated in order to deposit the desired thickness. The XRD results show that the perovskite PZT thick film is obtained after annealing at 650°C for 15 min. The cross section is clear and surface is dense, homogeneous and smooth. The film has the saturation polarization of 54μC/cm2, the remnant polarization of 30μC/cm2 and the coercive field of 50 kV/cm. The cantilever beam was fabricated by micromaching technology and the PZT thick film was etched by BHF/HCl solutions.

KW - Cantilever beam

KW - PZT

KW - Sol-gel

KW - Thick film

UR - http://www.scopus.com/inward/record.url?scp=35948993014&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:35948993014

SN - 0367-6234

VL - 39

SP - 1499

EP - 1502

JO - Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology

JF - Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology

IS - 9

ER -

Preparation and characterization of PZT thick film for piezoelectric cantilever beam by sol-gel

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