Portable Fourier transform infrared spectrometer based on an electrothermal MEMS mirror

Donglin Wang; Xiaoyan Han; Hongqiong Liu; Qiao Chen; Wei Wang; Huikai Xie

doi:10.1109/TRANSDUCERS.2017.7994039

Portable Fourier transform infrared spectrometer based on an electrothermal MEMS mirror

Donglin Wang^*, Xiaoyan Han, Hongqiong Liu, Qiao Chen, Wei Wang, Huikai Xie

^*此作品的通讯作者

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

5 引用（Scopus）

摘要

This paper reports a micro Fourier transform infrared spectrometer (μFTIR), enabled by an innovative H-shaped electrothermal microelectromechanical systems (MEMS) mirror. The H-shaped MEMS mirror consists of 32 symmetrically-distributed three-level ladder bi-layer actuators, leading to large linear displacement with negligible tilting. The tilting angle of the mirror is as small as 0.06°, so there is no need of complex closed-loop control. The new μFTIR was applied in the composition prediction of soybeans, and the experimental results show that it can accurately measure the protein content.

源语言	英语
主期刊名	TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
出版商	Institute of Electrical and Electronics Engineers Inc.
页	265-268
页数	4
ISBN（电子版）	9781538627310
DOI	https://doi.org/10.1109/TRANSDUCERS.2017.7994039
出版状态	已出版 - 26 7月 2017
已对外发布	是
活动	19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, 中国台湾期限: 18 6月 2017 → 22 6月 2017

出版系列

姓名	TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

会议

会议	19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
国家/地区	中国台湾
市	Kaohsiung
时期	18/06/17 → 22/06/17

访问文件

10.1109/TRANSDUCERS.2017.7994039

其它文件与链接

链接到 Scopus 的出版物

引用此

Wang, D., Han, X., Liu, H., Chen, Q., Wang, W., & Xie, H. (2017). Portable Fourier transform infrared spectrometer based on an electrothermal MEMS mirror. 在 TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (页码 265-268). 文章 7994039 (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994039

Wang, Donglin ; Han, Xiaoyan ; Liu, Hongqiong 等. / Portable Fourier transform infrared spectrometer based on an electrothermal MEMS mirror. TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. 页码 265-268 (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems).

@inproceedings{3211c11624854b8c80c9ec2f79557f1c,

title = "Portable Fourier transform infrared spectrometer based on an electrothermal MEMS mirror",

abstract = "This paper reports a micro Fourier transform infrared spectrometer (μFTIR), enabled by an innovative H-shaped electrothermal microelectromechanical systems (MEMS) mirror. The H-shaped MEMS mirror consists of 32 symmetrically-distributed three-level ladder bi-layer actuators, leading to large linear displacement with negligible tilting. The tilting angle of the mirror is as small as 0.06°, so there is no need of complex closed-loop control. The new μFTIR was applied in the composition prediction of soybeans, and the experimental results show that it can accurately measure the protein content.",

keywords = "Bimorph actuator, Electrothermal actuator, Fourier transform spectrometer, Large vertical displacement, MEMS mirror, Microspectrometer, NIR spectroscopy, Soybean composition prediction",

author = "Donglin Wang and Xiaoyan Han and Hongqiong Liu and Qiao Chen and Wei Wang and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 ; Conference date: 18-06-2017 Through 22-06-2017",

year = "2017",

month = jul,

day = "26",

doi = "10.1109/TRANSDUCERS.2017.7994039",

language = "English",

series = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "265--268",

booktitle = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",

address = "United States",

}

Wang, D, Han, X, Liu, H, Chen, Q, Wang, W & Xie, H 2017, Portable Fourier transform infrared spectrometer based on an electrothermal MEMS mirror. 在 TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems., 7994039, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Institute of Electrical and Electronics Engineers Inc., 页码 265-268, 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017, Kaohsiung, 中国台湾, 18/06/17. https://doi.org/10.1109/TRANSDUCERS.2017.7994039

Portable Fourier transform infrared spectrometer based on an electrothermal MEMS mirror. / Wang, Donglin; Han, Xiaoyan; Liu, Hongqiong 等.
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. 页码 265-268 7994039 (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - Portable Fourier transform infrared spectrometer based on an electrothermal MEMS mirror

AU - Wang, Donglin

AU - Han, Xiaoyan

AU - Liu, Hongqiong

AU - Chen, Qiao

AU - Wang, Wei

AU - Xie, Huikai

PY - 2017/7/26

Y1 - 2017/7/26

N2 - This paper reports a micro Fourier transform infrared spectrometer (μFTIR), enabled by an innovative H-shaped electrothermal microelectromechanical systems (MEMS) mirror. The H-shaped MEMS mirror consists of 32 symmetrically-distributed three-level ladder bi-layer actuators, leading to large linear displacement with negligible tilting. The tilting angle of the mirror is as small as 0.06°, so there is no need of complex closed-loop control. The new μFTIR was applied in the composition prediction of soybeans, and the experimental results show that it can accurately measure the protein content.

AB - This paper reports a micro Fourier transform infrared spectrometer (μFTIR), enabled by an innovative H-shaped electrothermal microelectromechanical systems (MEMS) mirror. The H-shaped MEMS mirror consists of 32 symmetrically-distributed three-level ladder bi-layer actuators, leading to large linear displacement with negligible tilting. The tilting angle of the mirror is as small as 0.06°, so there is no need of complex closed-loop control. The new μFTIR was applied in the composition prediction of soybeans, and the experimental results show that it can accurately measure the protein content.

KW - Bimorph actuator

KW - Electrothermal actuator

KW - Fourier transform spectrometer

KW - Large vertical displacement

KW - MEMS mirror

KW - Microspectrometer

KW - NIR spectroscopy

KW - Soybean composition prediction

UR - http://www.scopus.com/inward/record.url?scp=85029367531&partnerID=8YFLogxK

U2 - 10.1109/TRANSDUCERS.2017.7994039

DO - 10.1109/TRANSDUCERS.2017.7994039

M3 - Conference contribution

AN - SCOPUS:85029367531

T3 - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

SP - 265

EP - 268

BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017

Y2 - 18 June 2017 through 22 June 2017

ER -

Wang D, Han X, Liu H, Chen Q, Wang W, Xie H. Portable Fourier transform infrared spectrometer based on an electrothermal MEMS mirror. 在 TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc. 2017. 页码 265-268. 7994039. (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). doi: 10.1109/TRANSDUCERS.2017.7994039

Portable Fourier transform infrared spectrometer based on an electrothermal MEMS mirror

摘要

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