Polarization control over deep ultraviolet light by subwavelength metallic gratings

Guoguo Kang, Xiaodi Tan

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

Using subwavelength structures to manipulate the polarization of deep ultraviolet (DUV) light is generally known as difficult with the current nano-fabrication technologies. To ease the fabrication, an aluminum grating with its period slightly smaller than the DUV wavelength was designed to exhibit an inverse polarizing effect. At resonance, a pronounced inverse polarization extinction ratio of 35 dB was obtained in our experiment.

源语言英语
主期刊名JSAP-OSA Joint Symposia, JSAP 2014
出版商Optical Society of America (OSA)
ISBN(电子版)9784863484436
DOI
出版状态已出版 - 1 9月 2014
活动JSAP-OSA Joint Symposia, JSAP 2014 - Sapporo, Hokkaido, 日本
期限: 17 9月 201420 9月 2014

出版系列

姓名JSAP-OSA Joint Symposia, JSAP 2014

会议

会议JSAP-OSA Joint Symposia, JSAP 2014
国家/地区日本
Sapporo, Hokkaido
时期17/09/1420/09/14

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