TY - GEN
T1 - Piezeoelectric micromachined ultrasound tranducer array for photoacoustic imaging
AU - Liao, W.
AU - Liu, W.
AU - Rogers, J. E.
AU - Usmani, F.
AU - Tang, Y.
AU - Wang, B.
AU - Jiang, H.
AU - Xie, H.
PY - 2013
Y1 - 2013
N2 - A piezoelectric micromachined ultrasonic transducer (pMUT) array designed for photoacoustic imaging is presented in this paper. Two-dimensional pMUT arrays containing 144 elements (12×12 array) were bulk micromachined in silicon substrate. The devices were formed using two backside masks with deep reactive ion etching to create PZT thin film membranes and suspended silicon beams. The membrane radius is 25μm, with an 80μm element pitch. The total area for the pMUT array is approximately 1.6×1.6mm2. This membrane consists of 0.6μm PZT layer, 1μm elastic layer (SiO2) and 5μm supporting layer. Impedence and vibration measurements shows the resonant frequency of the pMUT elements is around 10MHz. Acoustic signal is detected using Pulse-Echo method. This high density acoustic sensor array has high array spatial gain and wide reception angle that can be used in photoacoustic imaging systems.
AB - A piezoelectric micromachined ultrasonic transducer (pMUT) array designed for photoacoustic imaging is presented in this paper. Two-dimensional pMUT arrays containing 144 elements (12×12 array) were bulk micromachined in silicon substrate. The devices were formed using two backside masks with deep reactive ion etching to create PZT thin film membranes and suspended silicon beams. The membrane radius is 25μm, with an 80μm element pitch. The total area for the pMUT array is approximately 1.6×1.6mm2. This membrane consists of 0.6μm PZT layer, 1μm elastic layer (SiO2) and 5μm supporting layer. Impedence and vibration measurements shows the resonant frequency of the pMUT elements is around 10MHz. Acoustic signal is detected using Pulse-Echo method. This high density acoustic sensor array has high array spatial gain and wide reception angle that can be used in photoacoustic imaging systems.
KW - Micromachined ultrasound sensors
KW - Photoacoustic Imaging
KW - pMUT
UR - http://www.scopus.com/inward/record.url?scp=84891700424&partnerID=8YFLogxK
U2 - 10.1109/Transducers.2013.6627146
DO - 10.1109/Transducers.2013.6627146
M3 - Conference contribution
AN - SCOPUS:84891700424
SN - 9781467359818
T3 - 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
SP - 1831
EP - 1834
BT - 2013 Transducers and Eurosensors XXVII
T2 - 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Y2 - 16 June 2013 through 20 June 2013
ER -
