TY - GEN
T1 - Optical mirror surface shape on-site measurement based on reverse Hartmann test
AU - Xu, Bowen
AU - Wang, Shanshan
AU - Song, Ci
AU - Hou, Yinlong
AU - Shi, Feng
AU - Hao, Qun
N1 - Publisher Copyright:
© COPYRIGHT SPIE.
PY - 2021
Y1 - 2021
N2 - High-precision optical systems are increasingly being used in military, civil and aerospace fields. Computer numerical control small grinding head grinding technology, performing as an efficient ultra-precision machining method, has been widely used in the field of mirror processing and manufacturing. High-precision detection of the surface shape is a key step to ensure the quality of the precision processing of optical mirrors. This can be quickly and effectively achieved by on-site measurement, therefore improving processing efficiency. A method called reverse Hartmann test was proposed for ultra-precision grinding machine tools. This method not only ensures high detection accuracy, but also has the advantages of simple structure, high detection efficiency, and strong robust ability, which can be used to perform the on-site measurement inside the grinding machine tools. According to the application conditions, the actual reverse Hartmann surface shape on-site detection system was built inside the small grinding head machine tools, and the on-site measurement of the 250mm flat mirror was completed within 3 minutes. The surface shape measurement repeatability was better than λ/37, which proved the efficiency and feasibility of reverse Hartmann test shape on-site detection system.
AB - High-precision optical systems are increasingly being used in military, civil and aerospace fields. Computer numerical control small grinding head grinding technology, performing as an efficient ultra-precision machining method, has been widely used in the field of mirror processing and manufacturing. High-precision detection of the surface shape is a key step to ensure the quality of the precision processing of optical mirrors. This can be quickly and effectively achieved by on-site measurement, therefore improving processing efficiency. A method called reverse Hartmann test was proposed for ultra-precision grinding machine tools. This method not only ensures high detection accuracy, but also has the advantages of simple structure, high detection efficiency, and strong robust ability, which can be used to perform the on-site measurement inside the grinding machine tools. According to the application conditions, the actual reverse Hartmann surface shape on-site detection system was built inside the small grinding head machine tools, and the on-site measurement of the 250mm flat mirror was completed within 3 minutes. The surface shape measurement repeatability was better than λ/37, which proved the efficiency and feasibility of reverse Hartmann test shape on-site detection system.
KW - Optical mirror
KW - reverse Hartmann test
KW - small grinding head machine tools
KW - surface shape on-site measurement
UR - http://www.scopus.com/inward/record.url?scp=85124704178&partnerID=8YFLogxK
U2 - 10.1117/12.2604316
DO - 10.1117/12.2604316
M3 - Conference contribution
AN - SCOPUS:85124704178
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies
A2 - Pu, Mingbo
A2 - Marsh, John H.
A2 - Fan, Bin
A2 - Dai, Yifan
A2 - Li, Xiong
A2 - Luo, Xiangang
PB - SPIE
T2 - 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies 2021
Y2 - 14 June 2021 through 17 June 2021
ER -