TY - JOUR
T1 - Optical and electrical properties of Y 2 O 3 thin films prepared by ion beam assisted deposition
AU - Leng, Jian
AU - Yu, Zhinong
AU - Li, Yuqiong
AU - Zhang, Dongpu
AU - Liao, Xiaoyi
AU - Xue, Wei
PY - 2010/8/1
Y1 - 2010/8/1
N2 - Y 2 O 3 thin films were deposited by ion beam assisted deposition (IBAD) and the effects of fabrication parameters such as substrate temperature and ion energy on the structure, optical and electrical properties of the films were investigated. The results show that the deposited Y 2 O 3 films had less optical absorption, larger refractive index, and better film crystallinity with the increase of substrate temperature or ion energy. The as-deposited Y 2 O 3 films without ion-beam bombardment had larger relative dielectric constant (ε r ) and the ε r decreased with time even over by 40%, while the ε r of films prepared with high ion energy had less changes, only less than 3%. Also, with the increase of ion energy, the electrical breakdown strength and the figure of merit increased.
AB - Y 2 O 3 thin films were deposited by ion beam assisted deposition (IBAD) and the effects of fabrication parameters such as substrate temperature and ion energy on the structure, optical and electrical properties of the films were investigated. The results show that the deposited Y 2 O 3 films had less optical absorption, larger refractive index, and better film crystallinity with the increase of substrate temperature or ion energy. The as-deposited Y 2 O 3 films without ion-beam bombardment had larger relative dielectric constant (ε r ) and the ε r decreased with time even over by 40%, while the ε r of films prepared with high ion energy had less changes, only less than 3%. Also, with the increase of ion energy, the electrical breakdown strength and the figure of merit increased.
KW - Electrical properties
KW - Ion beam assisted deposition (IBAD)
KW - Optical properties
KW - Y O
UR - http://www.scopus.com/inward/record.url?scp=77953231997&partnerID=8YFLogxK
U2 - 10.1016/j.apsusc.2010.03.054
DO - 10.1016/j.apsusc.2010.03.054
M3 - Article
AN - SCOPUS:77953231997
SN - 0169-4332
VL - 256
SP - 5832
EP - 5836
JO - Applied Surface Science
JF - Applied Surface Science
IS - 20
ER -