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Numerical study of heating and evaporation processes of quartz particles in RF inductively coupled plasma
Yu M. Grishin,
Long Miao
Bauman Moscow State Technical University
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Engineering
Carrier Gas
33%
Computer Simulation
16%
Current Coil
16%
Feed Rate
16%
Gas Cooling
16%
Inductively Coupled Plasma
100%
Numerical Study
100%
One Step
16%
Radio Frequency
16%
Vortex
66%
Physics
Gas Cooling
33%
Hydrogen Plasma
33%
Plasma Torch
100%
Turbogenerator
33%
Vortex
33%
Material Science
Silicide
25%
Silicon
25%
Vortex
100%
Chemical Engineering
Silicide
100%