Novel 0.9 THz integrated horn antenna based on MEMS technology

Planar integrated antenna has special advantages in Terahertz application, but with disadvantage of low gain. In this paper, a novel Terahertz integrated horn antenna operating at 0.9 THz was proposed in order to enhance the radiation performance of planar integrated antenna elements. The processing of this type horn antenna combine two kind MEMS techniques, silicon dry etching and silicon wet etching. The structure of the horn includes two parts, pyramid horn back cavity and octagonal horn front cavity. FEM (Finite Element Method) is used to analyze the performances of antenna. The main superiority of this kind integrated horn antenna is that it has more tunable parameters than other type MEMSbased integrated antennas. High performance Terahertz antenna elements can be obtained by synthesizing the parameters of the horn.