@inproceedings{53c31f647368472898ad6fddfa86f0c8,
title = "Non-null compensator design method in digital Moir{\'e} interferometry for freeform surface measurement",
abstract = "High accuracy interferometric testing for freeform optics surface has always been a great challenge because of its arbitrary form. Our group proposed a Digital Moir{\'e} Interferometric Technique (DMIT) based on partial compensator (PC) for aspheric surface testing since the year 2003. But the PC design method for non-rotational symmetric freeform surface is still a challenge. In this paper, we propose a PC design method for non-null freeform surface measurement. The PC generates non-rotational symmetry aberration by off axis and rotation round axis. Later the design criterion of PC is also analyzed. Finally an off-Axis aspheric surface was measured in the simulation experiment, and the error of PV and RMS is 0.0053λ and 0.0498λ theoretically. Experimental results indicate that the designed PC is able to be utilized in freeform surface measurement.",
keywords = "Digital Moir{\'e} Interferometry, Partial Compensation Lens, Residual Wavefront Aberration, Wavefront Slope",
author = "Qun Hao and Shaopu Wang and Yao Hu",
note = "Publisher Copyright: {\textcopyright} 2016 SPIE.; 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment, AOMATT 2016 ; Conference date: 26-04-2016 Through 29-04-2016",
year = "2016",
doi = "10.1117/12.2245286",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Sandy To and Yudong Zhang and Ming Xu and Fan Wu",
booktitle = "8th International Symposium on Advanced Optical Manufacturing and Testing Technology",
address = "United States",
}