Non-null compensator design method in digital Moiré interferometry for freeform surface measurement

Qun Hao, Shaopu Wang, Yao Hu

科研成果: 书/报告/会议事项章节会议稿件同行评审

5 引用 (Scopus)

摘要

High accuracy interferometric testing for freeform optics surface has always been a great challenge because of its arbitrary form. Our group proposed a Digital Moiré Interferometric Technique (DMIT) based on partial compensator (PC) for aspheric surface testing since the year 2003. But the PC design method for non-rotational symmetric freeform surface is still a challenge. In this paper, we propose a PC design method for non-null freeform surface measurement. The PC generates non-rotational symmetry aberration by off axis and rotation round axis. Later the design criterion of PC is also analyzed. Finally an off-Axis aspheric surface was measured in the simulation experiment, and the error of PV and RMS is 0.0053λ and 0.0498λ theoretically. Experimental results indicate that the designed PC is able to be utilized in freeform surface measurement.

源语言英语
主期刊名8th International Symposium on Advanced Optical Manufacturing and Testing Technology
主期刊副标题Optical Test, Measurement Technology, and Equipment
编辑Sandy To, Yudong Zhang, Ming Xu, Fan Wu
出版商SPIE
ISBN(电子版)9781628419191
DOI
出版状态已出版 - 2016
活动8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment, AOMATT 2016 - Suzhou, 中国
期限: 26 4月 201629 4月 2016

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
9684
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment, AOMATT 2016
国家/地区中国
Suzhou
时期26/04/1629/04/16

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