Nanometer profile measurement of aspheric surface using scanning deflectometry and rotating autocollimator: Self-calibration method of autocollimator

Kiyoshi Takamasu, Kyohei Ishikawa, Tomihiko Takamura, Muzheng Xiao, Satoru Takahashi

科研成果: 书/报告/会议事项章节会议稿件同行评审

源语言英语
主期刊名Proceedings - ASPE/ASPEN Summer Topical Meeting
主期刊副标题Manufacture and Metrology of Freeform and Off-Axis Aspheric Surfaces
出版商American Society for Precision Engineering, ASPE
121-125
页数5
ISBN(印刷版)9781887706650
出版状态已出版 - 2014
活动Joint Meeting of the American Society for Precision Engineering (ASPE) and the Asian Society for Precision Engineering (ASPEN) on Manufacture and Metrology of Freeform and Off-Axis Aspheric Surfaces - 2014 Summer Topical Meeting - Kohala Coast, HI, 美国
期限: 26 6月 201427 6月 2014

出版系列

姓名Proceedings - ASPE/ASPEN Summer Topical Meeting: Manufacture and Metrology of Freeform and Off-Axis Aspheric Surfaces

会议

会议Joint Meeting of the American Society for Precision Engineering (ASPE) and the Asian Society for Precision Engineering (ASPEN) on Manufacture and Metrology of Freeform and Off-Axis Aspheric Surfaces - 2014 Summer Topical Meeting
国家/地区美国
Kohala Coast, HI
时期26/06/1427/06/14

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