Mirofabrication and characterization of an integrated 3-axis CMOS-MEMS accelerometer

Engineering

• Amplifier 50%
• Axis Accelerometer 50%
• Bulk Silicon 50%
• Choppers (Circuits) 50%
• Device Structure 50%
• Electrical Isolation 50%
• Etching Process 50%
• Microelectromechanical System 100%
• Microfabrication 50%
• Noise Floor 50%
• Proof Mass 50%
• Signal Modulation 50%
• Thin Films 50%

Material Science

• Accelerometer 100%
• Amplifier 33%
• Bulk Silicon 33%
• Capacitance 33%
• Device Fabrication 33%
• Microelectromechanical System 100%
• Microfabrication 33%
• Plasma Etching 33%
• Thin Films 33%