Miniature Fourier transform spectrometer with a dual closed-loop controlled electrothermal micromirror

A large piston-displacement electrothermal micromirror with closed-loop control of both piston scan and tilting of the mirror plate is demonstrated for use in a miniature Fourier transform spectrometer. Constant scan velocity in an ultra large piston scan range has been demonstrated by the proposed closed-loop piston control scheme which can be easily implemented without considerably increasing system complexity. The experimental results show that the usable linear scan range generated by the micromirror has been extended up to 505 μm. The measured spectral resolution in a compact spectrometer reaches 20 cm^-1, or 0.57 nm at 532 nm wavelength. Compared to other presented systems, this microspectrometer will benefit from the closed-loop thermal actuator approach utilizing both the piston servo and tilt control to provide more consistent spectral response, improved spectral resolution and enhanced robustness to disturbances.