Microstructure design and optimization of high-sensitivity interdigital capacitive humidity sensor based on uncertainty analysis

Engineering

• Microstructure 100%
• Humidity Sensor 100%
• Capacitive 100%
• Optimal Design 33%
• Mathematical Model 33%
• Finite Element Method 33%
• Design Optimization 33%
• Structural Parameter 33%
• Critical Role 33%
• Measurement Process 33%
• Model Uncertainty 33%
• Propagation Model 33%
• Computational Resource 33%
• Quantitative Evaluation 33%
• Structural Uncertainty 33%
• Application Requirement 33%
• Physical Simulation 33%
• Sensor Material 33%

Material Science

• Humidity Sensor 100%
• Finite Element Method 33%