Microlens array wavefront measurement based on Transport of intensity equation and hybrid Gerchberg and Saxton iteration

Microlens arrays are widely used in various industrial cameras and detectors, and their wavefront consistency directly affects the performance of optical systems. The current non-interferometry computational imaging methods for measuring the wavefront of microlens arrays typically produce boundary artifacts and partially dope noise of high-frequency information. In order to accurately study and measure the consistency, relative position and wavefront aberration of each element in the microlens array. This paper presents a computational imaging method based on the intensity transfer equation (TIE) of discrete cosine transform (DCT) analysis and a novel hybrid Gerchberg-Saxton iteration (HGS-TIE) combining error reduction algorithm and input/output algorithm.This algorithm improves the accuracy of high-frequency phase measurement at the transitions between microlens and substrate. At the same time, boundary artifacts are eliminated, improving the overall accuracy of the measurement.