@inproceedings{c72d89d6b4a54655a9d9ef4435a3e4b7,
title = "MEMS mirrors submerged in liquid for wide-angle scanning",
abstract = "This paper reports an electrothermal MEMS scanning mirror working in liquid for the first time. By submerging the MEMS mirror into a mineral oil whose refractive index is 1.47, a wide-angle optical scan (>120°) was achieved at small driving voltage (<10V), and the scan frequency reached up to 30 Hz. The wide angle was achieved because of the angular increase of the 'Snell's Window' effect and the large mechanical tilt angle (±18°) of the MEMS mirror as well. The power consumption is 9.9 mW/° when working in air and 11.7 mW/° in the mineral oil. This submerged optical scanner may enable many new applications of wide-angle optics.",
keywords = "MEMS mirror, electrothermal bimorph, large mechanical angle, mineral oil, submerge, wide-angle scanning",
author = "Xiaoyang Zhang and Rui Zhang and Sanjeev Koppal and Lisa Butler and Xiang Cheng and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 ; Conference date: 21-06-2015 Through 25-06-2015",
year = "2015",
month = aug,
day = "5",
doi = "10.1109/TRANSDUCERS.2015.7181056",
language = "English",
series = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "847--850",
booktitle = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
address = "United States",
}