MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan

Lin Liu; Erkang Wang; Xiaoyang Zhang; Wenxuan Liang; Xingde Li; Huikai Xie

doi:10.1016/j.sna.2013.09.035

MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan

Lin Liu, Erkang Wang, Xiaoyang Zhang, Wenxuan Liang, Xingde Li, Huikai Xie^*

^*此作品的通讯作者

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61 引用（Scopus）

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A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ±26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.

源语言	英语
页（从-至）	89-95
页数	7
期刊	Sensors and Actuators A: Physical
卷	215
DOI	https://doi.org/10.1016/j.sna.2013.09.035
出版状态	已出版 - 15 8月 2014
已对外发布	是

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title = "MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan",

abstract = "A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ±26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.",

keywords = "3D confocal imaging, 3D microendoscope, Bimorph, Electrothermal actuator, MEMS mirror, MEMS tunable lens",

author = "Lin Liu and Erkang Wang and Xiaoyang Zhang and Wenxuan Liang and Xingde Li and Huikai Xie",

year = "2014",

month = aug,

day = "15",

doi = "10.1016/j.sna.2013.09.035",

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journal = "Sensors and Actuators A: Physical",

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T1 - MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan

AU - Liu, Lin

AU - Wang, Erkang

AU - Zhang, Xiaoyang

AU - Liang, Wenxuan

AU - Li, Xingde

AU - Xie, Huikai

PY - 2014/8/15

Y1 - 2014/8/15

N2 - A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ±26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.

AB - A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ±26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.

KW - 3D confocal imaging

KW - 3D microendoscope

KW - Bimorph

KW - Electrothermal actuator

KW - MEMS mirror

KW - MEMS tunable lens

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JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

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MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan

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