Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive

Sagnik Pal; Huikai Xie

doi:10.1109/OMEMS.2009.5338600

Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive

Sagnik Pal^*, Huikai Xie

^*此作品的通讯作者

University of Florida

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

1 引用（Scopus）

摘要

Actuation of thermal bimorph-based electrothermal micromirrors by pulse width modulated (PWM) voltage is reported. PWM actuation provides more flexibility over continuous voltage waveforms especially in the case of micromirror arrays.

源语言	英语
主期刊名	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
页	55-56
页数	2
DOI	https://doi.org/10.1109/OMEMS.2009.5338600
出版状态	已出版 - 2009
已对外发布	是
活动	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 - Clearwater, FL, 美国期限: 17 8月 2009 → 20 8月 2009

出版系列

姓名	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

会议

会议	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
国家/地区	美国
市	Clearwater, FL
时期	17/08/09 → 20/08/09

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10.1109/OMEMS.2009.5338600

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引用此

Pal, S., & Xie, H. (2009). Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive. 在 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 (页码 55-56). 文章 5338600 (2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009). https://doi.org/10.1109/OMEMS.2009.5338600

@inproceedings{580e3a8272d54766a310f80615ff82fa,

title = "Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive",

abstract = "Actuation of thermal bimorph-based electrothermal micromirrors by pulse width modulated (PWM) voltage is reported. PWM actuation provides more flexibility over continuous voltage waveforms especially in the case of micromirror arrays.",

keywords = "Bimorph, Electrothermal actuation, MEMS, Micromirror, PWM, Pulse width modulation",

author = "Sagnik Pal and Huikai Xie",

year = "2009",

doi = "10.1109/OMEMS.2009.5338600",

language = "English",

isbn = "9781424423828",

series = "2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009",

pages = "55--56",

booktitle = "2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009",

note = "2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 ; Conference date: 17-08-2009 Through 20-08-2009",

}

Pal, S & Xie, H 2009, Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive. 在 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009., 5338600, 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009, 页码 55-56, 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009, Clearwater, FL, 美国, 17/08/09. https://doi.org/10.1109/OMEMS.2009.5338600

Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive. / Pal, Sagnik; Xie, Huikai.
2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009. 2009. 页码 55-56 5338600 (2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive

AU - Pal, Sagnik

AU - Xie, Huikai

PY - 2009

Y1 - 2009

N2 - Actuation of thermal bimorph-based electrothermal micromirrors by pulse width modulated (PWM) voltage is reported. PWM actuation provides more flexibility over continuous voltage waveforms especially in the case of micromirror arrays.

AB - Actuation of thermal bimorph-based electrothermal micromirrors by pulse width modulated (PWM) voltage is reported. PWM actuation provides more flexibility over continuous voltage waveforms especially in the case of micromirror arrays.

KW - Bimorph

KW - Electrothermal actuation

KW - MEMS

KW - Micromirror

KW - PWM

KW - Pulse width modulation

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U2 - 10.1109/OMEMS.2009.5338600

DO - 10.1109/OMEMS.2009.5338600

M3 - Conference contribution

AN - SCOPUS:71749097275

SN - 9781424423828

T3 - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

SP - 55

EP - 56

BT - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

T2 - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

Y2 - 17 August 2009 through 20 August 2009

ER -

Pal S, Xie H. Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive. 在 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009. 2009. 页码 55-56. 5338600. (2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009). doi: 10.1109/OMEMS.2009.5338600

Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive

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