Magnetorheological finishing technology for polishing super-smooth optical surfaces

Using the standard MR fluid with 0.5 Pa·s initial viscosity, the main parameters such as working gap, relative velocity between the polishing wheel and the workpiece, concentration of CeO₂ and polishing time are analyzed experimentally on the home developed MRF system, whose polishing wheel combines self-rotation movement with co-rotation. The polishing practicability of the technology is verified for polishing a mirror made from K9, the roughness of the experimenting piece has decreased to 0.6315 nm Ra from initial 10.98 nm Ra after MRF for 28 min.