Low-Temperature Fabrication of Indium Oxynitride Thin-Film Transistors via Plasma-Assisted Solution Process

Xuyang Li, Bin Liu, Xianwen Liu, Guobin Sun, Haifeng Liang, Huan Liu, Qian Mi, Guangcai Yuan, Jianshe Xue, Zhinong Yu*

*此作品的通讯作者

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Engineering

Physics

Chemical Engineering

Material Science