Low stress MEMS delay mechanism

Guozhong Li, Gengchen Shi, Li Sui

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

For the existing symmetry Z-tooth MEMS delay mechanisms can not play sports in place under the influence of centrifugal force, this paper presents an asymmetric Z-tooth delay mechanism which can works reliably by weak environmental forces. Working principle and the stress condition of the mechanism are analyzed. Based on the dynamic model, this paper makes a computational analysis and simulation about the kinetic characteristics of the asymmetric Z-tooth delay mechanism, and the results show that the improved mechanism can works reliably and meets the requirements.

源语言英语
主期刊名Micro-Nano Technology XIV
出版商Trans Tech Publications Ltd.
1489-1494
页数6
ISBN(印刷版)9783037857397
DOI
出版状态已出版 - 2013
活动14th Annual Conference and the 3rd International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2012 - Hangzhou, 中国
期限: 4 11月 20127 11月 2012

出版系列

姓名Key Engineering Materials
562-565
ISSN(印刷版)1013-9826
ISSN(电子版)1662-9795

会议

会议14th Annual Conference and the 3rd International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2012
国家/地区中国
Hangzhou
时期4/11/127/11/12

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引用此

Li, G., Shi, G., & Sui, L. (2013). Low stress MEMS delay mechanism. 在 Micro-Nano Technology XIV (页码 1489-1494). (Key Engineering Materials; 卷 562-565). Trans Tech Publications Ltd.. https://doi.org/10.4028/www.scientific.net/KEM.562-565.1489